Adnano-tek中国区联系方式 于淼 :152 2727 0411 yumiao@adnano-tek.com
EBS-150
Feature:
-Base pressure: 5E-8 torr -8 inch sample (max.) -Tilt/raotation Substrate Manipulator with Z stage -IBAD (option) -Fully automatic process via software control -Water cooling chamber
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