MAIN SPECIFICATIONS:                                          

Cathode Capabillity:
-3 Rectangular Sputter Cathodes (450mm X 75mm)                                                     
-1 Rectangular Ion Source( or Sputter)

Sample Capabillity
-More than 200 pcs 15mmx15mm small sample
or  Multi bar shape samples 
or  Flexible substrate
-Double side coating

• Custom-type SS316L electro-polished chamber
• 5E-7 torr Base Pressure (5E-8 torr can reach via replace main pump)
• Ir heating element with sample heating temperature: 500°C
• DC, RF, or pulsed-DC power supplies
• Ion Source
• Pressure control system: upstream and downstream
• FBBeam System Control Software